fluoride, also known as tungsten hexafluoride, is a colorless gas.
Hexafluoride is nonflammable, but highly corrosive and very toxic.
Hexafluoride is the densest known gas at a pressure of 1 atm and
room temperature (25 °C).
- The molecule
is octahedral with the symmetry point group of Oh.
fluoride is a colorless gas that condenses to a colorless liquid
at 19.5” and freezes to a crystalline white solid at 2.5”.
fluoride fumes in moist air and must be handled under anhydrous
- The specific
gravity of the liquid is 3.441 at 15’. It may be handled in
carefully outgassed glass systems provided that greases, mercury,
and organic materials, as well as water, are absent from the
Hexafluoride gas is most commonly used in the production of
semiconductor circuits and circuit boards, through the process of
chemical vapor deposition.
hexafluoride of a purity high enough for semiconductor CVD is
produced by the reaction of fluorine gas with tungsten metal.
- The metal is
placed in a heated reactor, slightly pressurized to 1.2 to 2.0
psi, with a constant flow of WF6 infused with a small amount of
- On contact
with water tungsten(VI) fluoride forms hydrofluoric acid (HF),
which can penetrate the skin and cause damage to the subdermal
tissues and bone. Inhalation burns the respiratory tract and can
- WF6 is a
lachrymator which causes tearing and irritation of the eyes.
Contact causes burns to the eyes, skin and mucous membranes.
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